Synthesis of diamond by laser-induced chemical vapor deposition
- 15 September 1986
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 49 (11), 634-635
- https://doi.org/10.1063/1.97063
Abstract
Diamond has been obtained by ArF excimer laser‐induced chemical vapor deposition. The reaction was carried out by use of C2H2 diluted with H2 as a source gas and at the pressure range of 8–75 Torr. The products were characterized by scanning electron microscopy and reflection electron diffraction. Deposits prepared in the temperature range of 40–800 °C, which were measured by the thermocouple attached to the substrate, show several lines of diamond in the reflection electron diffraction photographs. The fact that the laser beam must be concentrated for the diamond formation to occur strongly suggests that the reaction proceeds through a multiple photon process.Keywords
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