An investigation of RF sputter etched silicon surfaces using helium ion backscatter
- 31 May 1975
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 18 (5), 431-435
- https://doi.org/10.1016/0038-1101(75)90045-3
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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