Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
A polysilicon-diaphragm-based pressure sensor technology
Home
Publications
A polysilicon-diaphragm-based pressure sensor technology
A polysilicon-diaphragm-based pressure sensor technology
MF
M M Farooqui
M M Farooqui
AE
A G R Evans
A G R Evans
Publisher Website
Google Scholar
Add to library
Cite
Download
Share
Download
1 December 1987
journal article
Published by
IOP Publishing
in
Journal of Physics E: Scientific Instruments
Vol. 20
(12)
,
1469-1471
https://doi.org/10.1088/0022-3735/20/12/007
Abstract
No abstract available
Keywords
POLYSILICON DIAPHRAGM
DIAPHRAGM BASED
BASED PRESSURE SENSOR
PRESSURE SENSOR TECHNOLOGY
Cited by 10 articles