Simple technique for fabricating limited coupler gratings by holographic method using standard thick photoresist
- 25 May 1995
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 31 (11), 914-915
- https://doi.org/10.1049/el:19950623
Abstract
The fabrication of photoresist gratings is considered. A solution to the problem of ‘transversal standing waves’ is given and appears simple and versatile.Keywords
This publication has 4 references indexed in Scilit:
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- Holographic lithography with thick photoresistApplied Physics Letters, 1983
- Photoresist gratings on reflecting surfacesJournal of Applied Physics, 1982
- Optical lithographyIEEE Transactions on Electron Devices, 1975