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Unbalanced dc magnetrons as sources of high ion fluxes
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Unbalanced dc magnetrons as sources of high ion fluxes
Unbalanced dc magnetrons as sources of high ion fluxes
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N. Savvides
N. Savvides
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1 May 1986
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 4
(3)
,
453-456
https://doi.org/10.1116/1.573904
Abstract
No abstract available
Keywords
ION FLUXES
HIGH ION
UNBALANCED DC MAGNETRONS
Cited by 180 articles