A comparison of atom and ion induced SSIMS—Evidence for a charge induced damage effect in insulator materials
- 31 December 1985
- journal article
- Published by Elsevier in Spectrochimica Acta Part B: Atomic Spectroscopy
- Vol. 40 (5-6), 871-877
- https://doi.org/10.1016/0584-8547(85)80141-5
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Static SIMS for applied surface analysisSurface and Interface Analysis, 1984
- Surface modifications due to preferential sputteringApplications of Surface Science, 1982
- Analysis of polymer surfaces by SIMS 1. An investigation of practical problemsSurface and Interface Analysis, 1982