Influence of the Pt electrode on the properties of sol-gel PZT-films
- 31 December 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 29 (1-4), 217-220
- https://doi.org/10.1016/0167-9317(95)00149-2
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Difference in microstructure between PZT thin films on Pt/Ti and those on PtIntegrated Ferroelectrics, 1995
- Investigation of surface roughness and hillock formation on platinized substrates used for Pt/PZT/Pt capacitor fabricationIntegrated Ferroelectrics, 1995
- Ferroelectric Properties of Crystalline-Oriented Lead-Zirconate-Titanates Formed by Sol-Gel Deposition TechniqueJapanese Journal of Applied Physics, 1995
- Effects of Titanium Buffer Layer on Lead-Zirconate-Titanate Crystallization Processes in Sol-Gel Deposition TechniqueJapanese Journal of Applied Physics, 1995
- Orientation of rapid thermally annealed lead zirconate titanate thin films on (111) Pt substratesJournal of Materials Research, 1994
- Electrodes for ferroelectric thin filmsIntegrated Ferroelectrics, 1993
- Preparation of Pb(Zr, Ti)O3 Films on Pt/Ti/Ta Electrodes by Sol-Gel ProcessJapanese Journal of Applied Physics, 1993
- Low temperature perovskite formation of lead zirconate titanate thin films by a seeding processJournal of Materials Research, 1993