Probe measurements of the space potential in a radio frequency discharge

Abstract

The dc and radio frequency (rf) components (and harmonics) of the probe potential have been measured in the midplane of a 13.56-MHz parallel-plane rf discharge in argon over a wide range of discharge voltages and at gas pressures between 10 mTorr and 1.0 Torr. rf potential measurements were made with different input capacitances to determine the true magnitude of the rf plasma potential and the probe capacitance. For a symmetrically driven rf discharge, the rf plasma potential Vrf is mainly composed of the second harmonic of the driving voltage Vdr over a wide range of gas pressures. For high values of Vdr, Vrf ≊0.1 Vdr while the dc probe potential Vdc is about 0.4 Vdr. These results are in good agreement with corresponding theoretical predictions found in the literature. For an asymmetrically driven rf discharge with equal electrode area, the rf plasma potential has an additional fundamental harmonic component equal to half the rf driving voltage. Values of rf plasma potential and probe capacitance given here allow us to specify the requirements on probe circuitry for different kinds of probe measurements in rf discharges.