Polarization modulation ellipsometry: A compact and easy handling instrument
- 1 December 1985
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 56 (12), 2222-2227
- https://doi.org/10.1063/1.1138403
Abstract
A polarization modulation ellipsometer for measurements of the complex dielectric function of opaque and reflecting materials in the wavelength range 230–920 nm is presented. The instrument can be built at relatively moderate cost but offers reasonable accuracy. It is suitable for routine measurements in a general solid-state laboratory because of its easy handling and maintenance.Keywords
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