Applications of Acoustic Microscopy in the Semiconductor Industry
- 1 January 1982
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Device Implications of the Electronic Effect in the Elastic Constants of SiliconIEEE Transactions on Sonics and Ultrasonics, 1982
- Observation of surface cracks with scanning acoustic microscopeJournal of Applied Physics, 1982
- Imaging of dopant regions in silicon with thermal-wave electron microscopyApplied Physics Letters, 1981
- Film adhesion studies with the acoustic microscpeThin Solid Films, 1980