Elements of semiconductor-device reliability

Abstract
Semiconductor-device quality and reliability are discussed in the context of the major factors producing failures, the relationship of process technology and its control to device quality and reliability, the testing procedures used to determine quality levels, and screening procedures that can be employed to segregate certain levels of device quality. Failure rates are presented for transistors and for both bipolar and MOS integrated circuits in several types of packages and for several kinds of device process technology.