Ion beam thinning and polishing of YBa2Cu3O7 films
- 30 October 1989
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 55 (18), 1915-1917
- https://doi.org/10.1063/1.102331
Abstract
Successive ion beam milling at grazing angles of a 2400‐Å‐thick, c‐axis‐oriented YBa2Cu3O7 film is shown to give smooth films which superconduct at thicknesses on the order of tens of angstroms. The thinning and polishing process is characterized at successive milling stages using resistance transitions, x‐ray analysis, scanning electron microscopy, and Rutherford backscattering and channeling analysis of composition and surface quality. As thinning proceeds, scanning electron microscopy and diffraction features associated with a‐axis texture are removed and crystalline quality, as measured by x rays and channeling, markedly improves.Keywords
This publication has 9 references indexed in Scilit:
- Superconducting Lines Fabricated from Epitaxial Y-Ba-Cu-O FilmsJapanese Journal of Applied Physics, 1988
- Controllable reduction of critical currents in YBa2Cu3O7−δ filmsApplied Physics Letters, 1988
- Epitaxial order and resistivity of high temperature superconductors grown on SrTiO3Journal of Crystal Growth, 1988
- Focused ion beam processes for high-T c superconductorsJournal of Vacuum Science & Technology B, 1988
- Rapid rate of ion milling for the highT c YBa2Cu3O7−y systemJournal of Materials Science Letters, 1988
- Reproducible technique for fabrication of thin films of high transition temperature superconductorsApplied Physics Letters, 1987
- Effects of radiation damage in ion-implanted thin films of metal-oxide superconductorsApplied Physics Letters, 1987
- Technology and applications of broad-beam ion sources used in sputtering. Part II. ApplicationsJournal of Vacuum Science and Technology, 1982
- Ion-Beam Techniques for Device FabricationJournal of Vacuum Science and Technology, 1971