The influence of deposition parameters on room temperature ozone sensing properties of InOx films
- 20 November 2001
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 80 (2), 155-161
- https://doi.org/10.1016/s0925-4005(01)00908-x
Abstract
No abstract availableKeywords
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