Line width control using a defocused low voltage electron beam
- 31 May 1999
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 46 (1-4), 219-222
- https://doi.org/10.1016/s0167-9317(99)00066-0
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Two-dimensional X-ray microfocusing using a curved crystal Bragg-Fresnel lensNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1997
- A special method to create gratings of variable line density by low voltage electron beam lithographyMicroelectronic Engineering, 1996
- Testing of submicrometer fluorescence microprobe based on Bragg–Fresnel crystal optics at the ESRFReview of Scientific Instruments, 1995