New Techniques For Roll Coating Of Optical Thin Film

Abstract

Methods of deposition have been developed which are adapted for the vacuum roll-to-roll coating of plastic with optical thin films. Planar magnetron sputtering and low pressure plasma assisted CVD are shown to be peculiarly fitted for this application. The construction of such an apparatus is described and examples of indium and indium-tin oxide films made by these techniques are given.© (1982) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.