Rutherford backscattering analysis of multilayered CrNi structures to be used for sputtering standards
- 15 December 1983
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 218 (1-3), 585-588
- https://doi.org/10.1016/0167-5087(83)91047-5
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Evolve, a time-dependent monte carlo code to simulate the effects of ion-beam-induced atomic mixingRadiation Effects, 1981
- Visual ion-beam images produced by electron and ion-beam interaction on surfacesJournal of Applied Physics, 1978
- Depth resolution and surface roughness effects in sputter profiling of NiCr multilayer sandwich samples using Auger electron spectroscopyThin Solid Films, 1977
- Electrical properties and stabilization of sputtered films by inert gas precipitationThin Solid Films, 1976