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Use Of A Quartz Crystal Microbalance Rate Monitor To Examine Photoproduct Effects On Resist Dissolution
Home
Publications
Use Of A Quartz Crystal Microbalance Rate Monitor To Examine Photoproduct Effects On Resist Dissolution
Use Of A Quartz Crystal Microbalance Rate Monitor To Examine Photoproduct Effects On Resist Dissolution
WH
W. D. Hinsberg
W. D. Hinsberg
CW
C. G. Willson
C. G. Willson
KK
K. K. Kanazawa
K. K. Kanazawa
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18 April 1985
conference paper
Published by
SPIE-Intl Soc Optical Eng
Vol. 539
,
6
https://doi.org/10.1117/12.947808
Abstract
No abstract available
Cited by 7 articles