High-voltage silicon thin film transistor on quartz

1 June 1982

journal article
Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters

Vol. 3 (6), 167-168
https://doi.org/10.1109/edl.1982.25524

Abstract

A high voltage enhancement-type thin film transistor (TFT) has been fabricated on quartz in layers of laser-recrystallized polysilicon. The fabrication details and TFT characteristics are described.

Keywords

THIN FILM TRANSISTORS
OPTICAL DEVICE FABRICATION
ANNEALING
LIQUID CRYSTAL DISPLAYS
AMORPHOUS SILICON
SUBSTRATES
FLAT PANEL DISPLAYS
SEMICONDUCTOR MATERIALS
GRAIN SIZE
POWER LASERS

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