Origin of emitting species in the plasma deposition of a-Si:H alloys
- 1 March 1981
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 52 (3), 1285-1288
- https://doi.org/10.1063/1.329752
Abstract
The power dependence of the emission intensities for the species Si, SiH, H, H2, and added N2 in the rf glow discharge decomposition of silane (SiH4) was studied. It was found that H and the emitting excited states of Si and SiH are primary products of the silane decomposition.Keywords
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