High-Q photonic crystal microcavities fabricated in a thin GaAs membrane
- 1 November 2001
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 19 (6), 2749-2752
- https://doi.org/10.1116/1.1412893
Abstract
We report on the fabrication of photonic crystalmicrocavities in GaAs having H1 and H2 defects for lattice constants as small as 255 nm. In H2 microcavities, we observed resonances with Q factors as high as 4000. The degeneracy of these high-Q modes is lifted by the imperfect nature of the fabrication process.Keywords
This publication has 13 references indexed in Scilit:
- Photonic crystal microcavities with self-assembled InAs quantum dots as active emittersApplied Physics Letters, 2001
- A Quantum Dot Single-Photon Turnstile DeviceScience, 2000
- Fabrication of photonic crystals for the visible spectrum by holographic lithographyNature, 2000
- Quantum Information Processing Using Quantum Dot Spins and Cavity QEDPhysical Review Letters, 1999
- Fabrication and Optical Properties of One Period of a Three-Dimensional Photonic Crystal Operating in the 5–10 µm Wavelength RegionJapanese Journal of Applied Physics, 1999
- Three-dimensional photonic crystal with a stop band from 135 to 195???mOptics Letters, 1999
- Smallest possible electromagnetic mode volume in a dielectric cavityIEE Proceedings - Optoelectronics, 1998
- Preparation of Photonic Crystals Made of Air Spheres in TitaniaScience, 1998
- Photonic CrystalsJournal of Modern Optics, 1994
- Photonic Band Gaps in Experimentally Realizable Periodic Dielectric StructuresEurophysics Letters, 1991