Influence of Buffer Layers on Lead Magnesium Niobate Titanate Thin Films Prepared by Pulsed Laser Ablation
- 1 September 1996
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 35 (9R), 4750
- https://doi.org/10.1143/jjap.35.4750
Abstract
Lead magnesium niobate titanate ( Pb[(Mg1/3Nb2/3)0.9Ti0.1]O3; PMN-PT) thin films were prepared on Pt/Ti/SiO2/Si substrates with buffer layers by pulsed laser ablation (PLA). Lead titanate (PT), barium titanate (BT) and barium strontium titanate (BST) were chosen as the materials of the buffer layer. The crystalline structure of the PMN-PT thin films on the buffer layers was a mixture of perovskite and pyrochlore phases. Among these samples, the PMN-PT thin films on the BST buffer layer have the highest perovskite fraction of over 95%. Average dielectric constant of the PMN-PT thin film on the BST buffer layer was about 1200. No serious interdiffusions between the bottom electrode, the buffer layer and the PMN-PT layers were observed.Keywords
This publication has 14 references indexed in Scilit:
- Effect of Oxygen Pressure on (BaxSr1-x)TiO3 Thin Films by Pulsed Laser AblationJapanese Journal of Applied Physics, 1995
- Deposition and Characterization of Ferroelectric Pb[(Mg1/3Nb2/3)xTi1-x]O3 Thin Films by RF Magnetron SputteringJapanese Journal of Applied Physics, 1994
- Dielectric Property of Epitaxial Films of BaTiO3 Synthesized by Laser AblationJapanese Journal of Applied Physics, 1994
- Control of Grain Structure of Laser-Deposited (Ba, Sr)TiO3 Films to Reduce Leakage CurrentJapanese Journal of Applied Physics, 1994
- The effect of electrode composition on rf magnetron sputtering deposition of Pb[(Mg1/3Nb2/3)0.7Ti0.3]O3 filmsJournal of Materials Research, 1994
- Dielectric Properties of (Ba, Sr)TiO3 Thin Films Deposited by RF SputteringJapanese Journal of Applied Physics, 1993
- Tunable Dielectric and Piezoelectric Characteristics of Lead Magnesium Niobate Titanate Relaxor Thin FilmsMRS Proceedings, 1993
- Analyses of Pt/Ti Electrodes for Plzt CapacitorsMRS Proceedings, 1991
- Processing, Perovskite Phase Development, and Dielectric Properties for Sol-Gel Derived Pb[(Mg1/3Nb2/3)0.9Ti0.1]O3 Thin LayersMRS Proceedings, 1990
- Dielectric Properties of Lead‐Magnesium Niobate CeramicsJournal of the American Ceramic Society, 1984