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Laser-induced plasmas for primary ion deposition of epitaxial Ge and Si films
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Publications
Laser-induced plasmas for primary ion deposition of epitaxial Ge and Si films
Laser-induced plasmas for primary ion deposition of epitaxial Ge and Si films
DL
D. Lubben
D. Lubben
SB
S. A. Barnett
S. A. Barnett
KS
K. Suzuki
K. Suzuki
SG
S. Gorbatkin
S. Gorbatkin
JG
J. E. Greene
J. E. Greene
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1 July 1985
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 3
(4)
,
968-974
https://doi.org/10.1116/1.583024
Abstract
No abstract available
Cited by 116 articles