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Surface roughness and subsurface damage characterization of fused silica substrates
Home
Publications
Surface roughness and subsurface damage characterization of fused silica substrates
Surface roughness and subsurface damage characterization of fused silica substrates
AW
Andreas Wuttig
Andreas Wuttig
JS
Joerg Steinert
Joerg Steinert
AD
Angela Duparre
Angela Duparre
HT
Horst Truckenbrodt
Horst Truckenbrodt
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6 September 1999
proceedings article
Published by
SPIE-Intl Soc Optical Eng
p.
369-376
https://doi.org/10.1117/12.360168
Abstract
No abstract available
Keywords
SILICA
SURFACE ROUGHNESS
ATOMIC FORCE MICROSCOPY
ETCHING
LIGHT SCATTERING
MANUFACTURING
OPTICAL INTERFEROMETRY
Cited by 7 articles