Emission spectroscopy study of N2-H2glow discharge for metal surface nitriding
- 14 May 1984
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 17 (5), 919-929
- https://doi.org/10.1088/0022-3727/17/5/008
Abstract
A N2-H2 glow discharge for metallic surface nitriding at low pressure (1-3 Torr) and low current density (1-6 mA cm-2) has been studied by emission spectroscopy. The N2, N2+, N, N+, H, NH and metal atom excited states have been detected. The rotational temperature of N2+(B2 Sigma u+) states in the negative glow near the cathode surface has been found to be in quasi-equilibrium with the cathode temperature. By using argon as a gas impurity (2%), it has been established that the N2(C3 Pi u) states are excited in the negative glow near the cathode fall by direct electron impact. The NH radicals appear to issue near the cathode surface as do metal atoms.Keywords
This publication has 6 references indexed in Scilit:
- Temperature measurement of an N2 glow discharge by emission spectroscopyPhysics Letters A, 1983
- The use of ?actinometer? gases in optical diagnostics of plasma etching mixtures: SF6-O2Plasma Chemistry and Plasma Processing, 1981
- Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle densityJournal of Applied Physics, 1980
- Role of nitrogen atoms in ``ion-nitriding''Journal of Applied Physics, 1974
- Study of ion-nitridingJournal of Applied Physics, 1973
- Étude des spectres de rayons γ émis dans les résonances de l'or après capture neutroniqueJournal de Physique, 1973