Refractive-index-adjustable SiO2-Ta2O5 films for integrated optical circuits
- 15 May 1978
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 32 (10), 666-668
- https://doi.org/10.1063/1.89848
Abstract
This report is about the preparation and the optical transmission loss of rf‐sputtered SiO2‐Ta2O5 films that are suitable for use as transmission media in integrated optical circuits. It is shown that the films, which can be produced with a refractive‐index range from 1.46 to 2.08 at 6328 Å wavelength by suitably selecting the ratio of the target constituents, exhibit a low optical transmission loss of less than 0.8 dB/cm for the TE0 mode.Keywords
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