Extremely high stress in graded interfacial layers: Thin films of Hf on sapphire

Publisher Website

1 January 1977

journal article
Published by American Vacuum Society in Journal of Vacuum Science and Technology

Vol. 14 (1), 85-88
https://doi.org/10.1116/1.569179

Abstract

No abstract available

Keywords

THIN FILM

Cited by 7 articles