Recent progress in filtered vacuum arc deposition
- 1 December 1996
- journal article
- Published by Elsevier BV in Surface and Coatings Technology
- Vol. 86-87, 243-253
- https://doi.org/10.1016/s0257-8972(96)03023-x
Abstract
No abstract availableThis publication has 64 references indexed in Scilit:
- Vacuum arc plasma jet propagation in a toroidal ductJournal of Applied Physics, 1996
- Transport of macroparticles in magnetized plasma ductsIEEE Transactions on Plasma Science, 1996
- Transport of vacuum arc plasmas through magnetic macroparticle filtersPlasma Sources Science and Technology, 1995
- Focused injection of vacuum arc plasmas into curved magnetic filtersJournal of Applied Physics, 1994
- Plasma motion in a filtered cathodic vacuum arcIEEE Transactions on Plasma Science, 1993
- The deposition of niobium, NbN and Nb2O5 films by filtered arc evaporationJournal of Materials Science Letters, 1993
- Low Energy Ion Implantation / Deposition as a Film Synthesis and Bonding ToolMRS Proceedings, 1993
- Modeling plasma flow in straight and curved solenoidsJournal of Applied Physics, 1991
- Ion-beam-deposited films produced by filtered arcevaporationThin Solid Films, 1990
- Coating technology based on the vacuum arc-a reviewIEEE Transactions on Plasma Science, 1990