Zirconium dioxide thin films deposited by ALE using zirconium tetrachloride as precursor
- 1 January 1994
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 75 (1-4), 333-340
- https://doi.org/10.1016/0169-4332(94)90180-5
Abstract
No abstract availableThis publication has 32 references indexed in Scilit:
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