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Structural investigation of silicon epitaxial layers grown by solid state reactions
Home
Publications
Structural investigation of silicon epitaxial layers grown by solid state reactions
Structural investigation of silicon epitaxial layers grown by solid state reactions
WT
W. Tseng
W. Tseng
ZL
Z.L. Liau
Z.L. Liau
SL
S.S. Lau
S.S. Lau
MN
M.-A. Nicolet
M.-A. Nicolet
JM
J.W. Mayer
J.W. Mayer
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1 August 1977
journal article
Published by
Elsevier
in
Thin Solid Films
Vol. 45
(1)
,
148
https://doi.org/10.1016/0040-6090(77)90217-6
Abstract
No abstract available
Keywords
SOLID STATE REACTIONS
STRUCTURAL INVESTIGATION
EPITAXIAL LAYERS
LAYERS GROWN
SILICON EPITAXIAL
Cited by 1 article