Abstract
For Ne, Ar, and Cs‐Ar positive column plasmas a comparison is presented between Boltzmann and two‐electron‐group model (2‐EGM) calculations. This 2‐EGM is an approximation method to account for deviations from a Maxwellian electron energy distribution in plasma modeling. The comparison makes it possible to obtain in the 2‐EGM an accurate normalization function for the high‐energy tail of the electron energy distribution. The 2‐EGM is found to give electron impact collision and energy transfer rates that agree well with those from the Boltzmann calculation over a wide range of currents and pressures.