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ELABORATION OF M-TYPE Ba-FERRITES FILMS BY R.F. SPUTTERING
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Publications
ELABORATION OF M-TYPE Ba-FERRITES FILMS BY R.F. SPUTTERING
ELABORATION OF M-TYPE Ba-FERRITES FILMS BY R.F. SPUTTERING
EL
E. Lacroix
E. Lacroix
PG
P. Gerard
P. Gerard
DC
D. Challeton
D. Challeton
BR
B. Rolland
B. Rolland
BB
B. Bechevet
B. Bechevet
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1 December 1988
journal article
Published by
EDP Sciences
in
Le Journal de Physique Colloques
Vol. 49
(C8)
,
C8-941
https://doi.org/10.1051/jphyscol:19888429
Abstract
Amorphous Ba-M films have been prepared in a R.F. TFTS apparatus. Their composition is always the same as the target. These films prepared at 20 °C and 400 °C were amorphous. Only those deposited at 400 °C become oriented after annealing
Keywords
TYPE BA
SPUTTERING
ELABORATION
FILMS BY R.F
BA FERRITES FILMS
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Cited by 4 articles