Pulsed-Laser Deposition and Characterization of Amorphous Diamondlike Carbon Films
- 1 January 1994
- journal article
- Published by Springer Science and Business Media LLC in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- Noncrystalline films with the chemistry, bonding, and properties of diamondJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
- Structure, dynamics, and electronic properties of diamondlike amorphous carbonPhysical Review Letters, 1993
- X-ray-diffraction studies of Co/Re superlatticesPhysical Review B, 1993
- Density and defects in thin metal films using x-ray reflectivity and variable-energy positronsJournal of Applied Physics, 1992
- Pulsed laser deposition of diamond-like carbon filmsJournal of Applied Physics, 1992
- Characterization of chemical bonding and physical characteristics of diamond-like amorphous carbon and diamond filmsJournal of Materials Research, 1992
- Graphitic network models of ‘‘diamondlike’’ carbonJournal of Applied Physics, 1990
- Concentration profiling using x-ray reflectivity: Application to Cu-Al interfacesJournal of Applied Physics, 1989
- Diamond and diamondlike films: Deposition processes and propertiesJournal of Vacuum Science & Technology A, 1989
- Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon filmsPhysical Review B, 1984