Acoustic microsensors—the challenge behind microgravimetry

Abstract

Acoustic microsensors are commonly known as high-resolution mass-sensitive devices. This is a restricted view in many chemical and biosensor applications, especially in liquids. Sensitivity to non-gravimetric effects is a challenging feature of acoustic sensors. In this review we give an overview of recent developments in resonant sensors including micromachined devices and also list recent activity relating to the (bio)chemical interface of acoustic sensors. Major results from theoretical analysis of quartz crystal resonators, descriptive for all acoustic microsensors are summarized, and non-gravimetric contributions to the sensor signal from viscoelasticity and interfacial effects are discussed. We finally conclude with some future perspectives.