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Measurement of Outgassing Rate by Conductance Modulation Method.
Home
Publications
Measurement of Outgassing Rate by Conductance Modulation Method.
Measurement of Outgassing Rate by Conductance Modulation Method.
MM
Michio Minato
Michio Minato
YI
Yoshio Itoh
Yoshio Itoh
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1 January 1993
journal article
Published by
The Vacuum Society of Japan
in
SHINKU
Vol. 36
(3)
,
175-177
https://doi.org/10.3131/jvsj.36.175
Abstract
No abstract available
Keywords
OUTGASSING RATE
MODULATION METHOD
CONDUCTANCE MODULATION
MEASUREMENT OF OUTGASSING
Cited by 10 articles