An automated experimental vacuum deposition system
- 1 January 1964
- Vol. 14 (1), 3-6
- https://doi.org/10.1016/0042-207x(64)90779-1
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Thin Film Thermocouples for Substrate Temperature MeasurementReview of Scientific Instruments, 1963