Threshold for argon bubble growth in sputtered amorphous Nb3Ge

Abstract
We have studied the influence of the bias potential on argon incorporation and bubble formation in sputtered thin films of a‐Nb3Ge. Above 100 V bias bubbles are observed directly by transmission electron microscopy and indirectly by abrupt changes in the electronic properties. The influence of the sputter parameters on argon incorporation at 0 V bias is also investigated.