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The inductively coupled R.F. (radio frequency) plasma
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Publications
The inductively coupled R.F. (radio frequency) plasma
The inductively coupled R.F. (radio frequency) plasma
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M. I. Boulos
M. I. Boulos
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1 January 1985
journal article
Published by
Walter de Gruyter GmbH
in
Pure and Applied Chemistry
Vol. 57
(9)
,
1321-1352
https://doi.org/10.1351/pac198557091321
Abstract
No abstract available
Keywords
RADIO FREQUENCY
Cited by 202 articles