Interferometric measurements of the complex amplitude of the defocus signal V(z) in the confocal scanning optical microscope
- 15 October 1986
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 60 (8), 2708-2712
- https://doi.org/10.1063/1.337099
Abstract
A confocal interference microscope incorporating an electro‐optic phase modulator has been used to make simultaneous measurements of the inphase and quadrature components of the confocal signal as a reflecting surface is scanned axially, the so‐called V(z) response. Comparison with previously published theoretical predictions is seen to be favorable.Keywords
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