Residual stress in epitaxial silicon film on sapphire
- 1 December 1965
- journal article
- research article
- Published by Elsevier in Solid-State Electronics
- Vol. 8 (12), 994-995
- https://doi.org/10.1016/0038-1101(65)90167-x
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Mechanical stress considerations in thin-film devicesSolid-State Electronics, 1963
- Mechanical properties of single crystals of siliconPhilosophical Magazine, 1962
- Thermal Expansion of SiliconJournal of Applied Physics, 1960
- Measurement of Elastic Constants at Low Temperatures by Means of Ultrasonic Waves–Data for Silicon and Germanium Single Crystals, and for Fused SilicaJournal of Applied Physics, 1953