A native oxidation of by anodization in mixed solutions of glycol and water (AGW) is described. A detailed comparison between the AGW process and anodization in aqueous solutions (AAS) shows the basic importance of (i) the simultaneous oxide dissolution during growth and (ii) the initial electrochemical active‐passive transition of the anode. The results demonstrate the substantial superiority of the AGW process over various AAS processes. Factors relevant for uniform, stable, and reproducible oxidation are studied which include the effects of illumination, sample edges, and stirring. The dependence of the thickness‐voltage rate constant on the current density is established. The AGW process exhibits a high current efficiency.