Design and calibration of a microfabricated floating-element shear-stress sensor
- 1 June 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 35 (6), 750-757
- https://doi.org/10.1109/16.2527
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Microfabricated structures for the i n s i t u measurement of residual stress, Young’s modulus, and ultimate strain of thin filmsApplied Physics Letters, 1987
- Fabrication and testing of a micromachined shear sensorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1987
- An outline of the techniques available for the measurement of skin friction in turbulent boundary layersProgress in Aerospace Sciences, 1979
- The resonant gate transistorIEEE Transactions on Electron Devices, 1967