Ionized physical vapor deposition (IPVD): A review of technology and applications
Top Cited Papers
- 1 August 2006
- journal article
- review article
- Published by Elsevier in Thin Solid Films
- Vol. 513 (1-2), 1-24
- https://doi.org/10.1016/j.tsf.2006.03.033
Abstract
No abstract availableKeywords
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