Theoretical analysis of the energy spectra of back-scattered ions
- 1 December 1973
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 19 (1), 121-135
- https://doi.org/10.1016/0040-6090(73)90029-1
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- Estimation of impurity profiles in ion-implanted amorphous targets using joined half-Gaussian distributionsApplied Physics Letters, 1973
- Profiling of periodic structures (GaAs–GaAlAs) by nuclear backscatteringJournal of Applied Physics, 1973
- Ion implantation in semiconductors—Part II: Damage production and annealingProceedings of the IEEE, 1972
- Spatial Distribution of Energy Deposited by Energetic Heavy Ions in SemiconductorsJournal of the Physics Society Japan, 1971
- Spatial distribution of ions incident on solid target as a function of instantaneous energyRadiation Effects, 1971
- Determination of Surface Impurity Concentration Profiles by Nuclear BackscatteringJournal of Applied Physics, 1971
- Range of Heavy Ions in SolidsPhysical Review B, 1962