Electrical cross-talk in two-port resonators — the resonant silicon beam force sensor
- 31 March 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 31 (1-3), 168-173
- https://doi.org/10.1016/0924-4247(92)80099-o
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Finite-Mode Bond-Graph Model Of A Resonant Silicon-Beam Force SensorInternational Journal of Modelling and Simulation, 1992
- R.F. planar magnetron sputtered ZnO films II: Electrical propertiesThin Solid Films, 1991
- Piezoelectrically driven silicon beam force sensorSensors and Actuators A: Physical, 1991
- Thin-film ZnO as micromechanical actuator at low frequenciesSensors and Actuators A: Physical, 1990
- Sensors with digital or frequency outputSensors and Actuators, 1988
- Resonant-microbridge vapor sensorIEEE Transactions on Electron Devices, 1986