Precision of Ellipsometric Measurement
- 1 April 1970
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America
- Vol. 60 (4), 490-494
- https://doi.org/10.1364/josa.60.000490
Abstract
By numerical analysis of the general formulas for standard ellipsometiric measurement, positions of the compensator, polarizer, and analyzer can be found such that the errors of Δ and ψ are minimized. Such optimal conditions can be found for any value of Δ and ψ from plots that are given. The improvement of precision over that of usual methods can be one order of magnitude or better in some Δ, ψ regions.Keywords
This publication has 1 reference indexed in Scilit:
- Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometryJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963