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A sputtering wind
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A sputtering wind
A sputtering wind
DH
D. W. Hoffman
D. W. Hoffman
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1 May 1985
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 3
(3)
,
561-566
https://doi.org/10.1116/1.572994
Abstract
No abstract available
Keywords
SPUTTERING
ROTATION
ORIENTATION
MODEL
WIND
MIDLENGTH
MAGNETRON
SOURCE
BASE PRESSURE
Cited by 115 articles