Comparative study of Si(111), silicon oxide, SiC and Si3N4 surfaces by secondary ion mass spectroscopy (SIMS)
- 1 July 1975
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 28 (1), 59-64
- https://doi.org/10.1016/0040-6090(75)90275-8
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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- Auger electron spectroscopy of SiSurface Science, 1970
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- Evidence for carbon contamination on vacuum heated surfaces by electron paramagnetic resonanceSurface Science, 1970
- Carbon contamination of Si (111) surfacesSurface Science, 1969