Thin films of ferroelectric materials (PZT and PLZT) have been deposited by dc reactive co-sputtering from composite metal target. Although the structure of the resulting films without substrate heating was proved as amorphous through X-ray diffraction, it can be changed to provide a desired perovskite structure by subsequent heat-treatment in a lead-compensated atomosphere. Some of the films, after poling in the planar direction, showed an obvious piezoelectric activity.