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Anomalous Impurity Diffusion in Epitaxial Silicon near the Substrate
Home
Publications
Anomalous Impurity Diffusion in Epitaxial Silicon near the Substrate
Anomalous Impurity Diffusion in Epitaxial Silicon near the Substrate
DK
D. Kahng
D. Kahng
CT
C. O. Thomas
C. O. Thomas
RM
R. C. Manz
R. C. Manz
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1 January 1962
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 109
(11)
,
1106
https://doi.org/10.1149/1.2425248
Abstract
No abstract available
Keywords
EPITAXIAL SILICON
SUBSTRATE
IMPURITY DIFFUSION
ANOMALOUS IMPURITY
DIFFUSION IN EPITAXIAL
Cited by 19 articles