Electron beam formation of 800 wide aluminium lines
- 1 March 1967
- journal article
- Published by IOP Publishing in Journal of Scientific Instruments
- Vol. 44 (3), 231-234
- https://doi.org/10.1088/0950-7671/44/3/420
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Scanning Electron MicroscopyPublished by Elsevier ,1966
- Combined electron and ion beam processes for microelectronicsMicroelectronics Reliability, 1965
- Application of the scanning electron microscope to semiconductor device structuresMicroelectronics Reliability, 1965